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Abstract The active-particle number density is a key parameter for plasma material processing, space propulsion, and plasma-assisted combustion. The traditional actinometry method focuses on measuring the density of the atoms in the ground state, but there is a lack of an effective optical emission spectroscopy method to measure intra-shell excited-state densities. The latter atoms have chemical selectivity and higher energy, and they can easily change the material morphology as well as the ionization and combustion paths. In this work, we present a novel state-resolved actinometry (SRA) method, supported by a krypton line-ratio method for the electron temperature and density, to measure the number densities of nitrogen atoms in the ground and intra-shell excited states. The SRA method is based on a collisional-radiative model, considering the kinetics of atomic nitrogen and krypton including their excited states. The densities measured by our method are compared with those obtained from a dissociative model in a miniature electron cyclotron resonance (ECR) plasma source. Furthermore, the saturation effect, in which the electron density remains constant due to the microwave propagation in an ECR plasma once the power reaches a certain value, is used to verify the electron density measured by the line-ratio method. An ionization balance model is also presented to examine the measured electron temperature. All the values obtained with the different methods are in good agreement with each other, and hence a set of verified rate coefficient data used in our method can be provided. A novel concept, the ‘excited-state system’, is presented to quickly build an optical diagnostic method based on the analysis of quantum number propensity and selection rules. 

Abstract The ionization fraction is a key figure of merit for optimizing the performance of plasma device. This work presents an optical emission spectroscopy (OES) method to determine the ionization fraction in low-temperature xenon plasma. The emission line-ratio of xenon ionic and atomic 6p–6stransitions is used in this method. A comprehensive collisional-radiative model developed in our previous work is employed to describe the relationship between the line-ratios and the plasma parameters. It is found that some special line-ratios have a sensitive relationship to the ionization fraction, e.g. the ratio of the 460.30 nm line and 828.01 nm lines. These line-ratios are selected for the diagnostic method. The method is demonstrated in a magnetized discharge chamber. The axially-resolved emission spectra of the ionization chamber are measured, and from those the ionization fraction along the chamber axis is determined via the OES method. The axially-resolved ionization fraction is found to be dependent on the magnetic field and agrees well with those obtained from a Langmuir probe. In the experiment, the probe is overheated under some conditions, possibly due to the bombardment by energetic particles. In this case, no results can be obtained from the probe, while the OES method can still obtain reasonable results. Combined with optical tomography and spectral imaging technology, the OES method can also provide the spatial distribution of the ionization fraction, which is needed for revealing the discharge mechanisms of plasma devices.